SLIT NOZZLE AND SUBSTRATE TREATMENT APPARATUS

Title:

SLIT NOZZLE AND SUBSTRATE TREATMENT APPARATUS

Document Type and Number:

Japanese Patent JP2005262084

Kind Code:

A

Abstract:

To provide a slit nozzle having an opening interval of a discharge port made uniform, without being affected by the nature of respective nozzles.

A 1st nozzle body part and a 2nd nozzle body part 411 constituting the slit nozzle are included and a fixing screw hole group 414 (a 2nd screw hole group 414b), an opening adjusting screw hole group 416 (an adjusting screw hole group 416b) and a closing adjusting screw hole group 417 (an adjusting screw hole group 417b) are provided on a shim plate. After these members are assembled by screwing fixing bolts to the fixing screw hole group 414, the opening interval is measured. Adjusting screws are screwed to the adjusting screw hole group 416 in a place where the opening interval is narrower than a desired one and adjusting screws are screwed to the closing adjusting screw hole group 417 in a place where the opening interval is wider. As a result, the opening interval of the discharge port is controlled to be made uniform in a Y axial direction.

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Inventors:

IKEDA FUMIHIKO
FURUMURA TOMOYUKI
KAJIYA HIROYUKI

Application Number:

JP2004078145A

Publication Date:

September 29, 2005

Filing Date:

March 18, 2004

Export Citation:

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Assignee:

DAINIPPON SCREEN MFG

International Classes:

G03F7/16; B05C5/02; B08B3/02; (IPC1-7): B05C5/02; B08B3/02; G03F7/16

Domestic Patent References:

JPH0256272A	1990-02-26
JPH0359067U	1991-06-10
JPH11188301A	1999-07-13
JP2002239436A	2002-08-27
JP4315796B2	2009-08-19

Attorney, Agent or Firm:

Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita

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