Title:
SLURRY FEEDER
Document Type and Number:
Japanese Patent JP2015182179
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a slurry feeder capable of stably feeding slurry liquid.SOLUTION: The slurry feeder comprises: a storage tank that stores slurry liquid including oxide particles; feeding piping 13 leading from the storage tank to processing device; a reciprocating high pressure pump 25 arranged at an outlet side of the storage tank, of the feeding piping 13; ball-type check valves 23 and 27 arranged at the inlet side and the outlet side respectively of the high pressure pump 25. Balls 23a and 27a of the check valves are composed of oxides. The oxides included in the slurry liquid and the oxides constituting the balls 23a and 27a of the check valve are made of the same components.
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Inventors:
ISHIKAWA EIJI
Application Number:
JP2014061245A
Publication Date:
October 22, 2015
Filing Date:
March 25, 2014
Export Citation:
Assignee:
SUMITOMO BAKELITE CO
International Classes:
B24B57/02; B24B37/00; H01L21/304
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