SLURRY FEEDING DEVICE - MATSUSHITA ELECTRIC IND CO LTD

Title:

SLURRY FEEDING DEVICE

Document Type and Number:

Japanese Patent JP2004098286

Kind Code:

A

Abstract:

To restrain the enlargement of grinding grains by the coagulation of a slurry being supplied to a CMP device.

This slurry supply device A is provided with enclosed slurry bottles 1, 2, a piping system 3, a wet nitrogen producing device 4, wet nitrogen supply piping 5, suction nozzles 13a, 13c, spouting nozzles 13b, 13d, a temperature adjustor 12, flow control valves 7a-7j, 7x, liquid sending pumps 9a, 9b and a control system 10 for controlling the operation and flow rate of respective liquid sending pumps 9a, 9b. A joint is not provided at the connection part of the piping in the piping system 3, and the shape of the corner part of the piping is a curvilinear shape with a curvature radius of 5cm or larger to prevent accumulation of slurry 30.

Inventors:

TAGAMI AKIHIRO
HIDAKA YOSHIHARU
HASHIMOTO SHIN

Application Number:

JP2003378417A

Publication Date:

April 02, 2004

Filing Date:

November 07, 2003

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD

International Classes:

B24B57/02; B24B37/00; H01L21/304; (IPC1-7): B24B57/02; B24B37/00; H01L21/304

Attorney, Agent or Firm:

Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Yuji Takeuchi
Katsumi Imae
Tomoo Harada

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