PURPOSE: To reduce loss of rotational energy by a method wherein three freedoms out of five freedoms other than rotation are controlled and bound positively and two freedoms are bound passively.
CONSTITUTION: The axial-flow molecular pump is a mechanism by which gas molecules are transferred from the intake port to the exhaust port by high-speed revolution of rotor disk 8-a by a high-frequency motor 10. A rotating member of the axial-flow molecular pump is supported contactlessly in a way that it is positively floated along the axis of rotation by the parts 7,9,13 and is passively supported at upper part horizontally by the part 7 and is positively supported at lower part horizontally by the parts 11, 12. Such complete contactless floatation can fully demonstrate original advantages of the magnetic bearing and entails less rotational energy even as used for superhigh-speed rotation because of no mechanical contact with the bearing.
ISHIZAWA TADAO
URANO TOMOAKI
| JPS5160005A | 1976-05-25 | |||
| JPS5226292A | 1977-02-26 |