Title:
小型電子銃
Document Type and Number:
Japanese Patent JP4349964
Kind Code:
B2
Abstract:
To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a non-evaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening/closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the non-evaporative getter pump. It is possible to keep a high vacuum pressure of 10 -8 Pa without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.
More Like This:
Inventors:
Soichi Katagiri
Taku Oshima
Taku Oshima
Application Number:
JP2004111682A
Publication Date:
October 21, 2009
Filing Date:
April 06, 2004
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/18; H01J7/16; H01J7/18; H01J37/07; H01J37/073; H01J41/20
Domestic Patent References:
| JP6111745A | ||||
| JP7230778A | ||||
| JP8022787A | ||||
| JP63291348A | ||||
| JP62066156U | ||||
| JP2001126657A |
Attorney, Agent or Firm:
Manabu Inoue