Title:
SOFT X-RAY DETECTOR
Document Type and Number:
Japanese Patent JP3220500
Kind Code:
B2
Abstract:
PURPOSE: To provide a soft X-ray detector which is highly sensitive to soft X-rays and not sensitive to light other than the soft X-ray region such as visible light and which is easy to handle.
CONSTITUTION: An internally amplifying solid image pickup element provided with a surface electrode layer 2, a photoelectric conversion layer 1 and a semiconductor detector is formed, wherein thickness dA of the photoelectric conversion layer 1 and thickness dB of the surface electrode layer 2 are specified to satisfy conditions (A), (B) respectively. Condition (A): dA≥0.183λ/KA, condition (B): dB≤0.183λ/KB where KA is an absorption coefficient of a material constituting the photoelectric conversion layer 1 with respect to light of wavelength λ, and KB is an absorption coefficient of a material constituting the surface electrode layer 2 with respect to light of wavelength λ.
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Inventors:
Yoshiaki Horikawa
Keiki Iketaki
Hiroaki Nagai
Shoichiro Mochimaru
Keiki Iketaki
Hiroaki Nagai
Shoichiro Mochimaru
Application Number:
JP5804092A
Publication Date:
October 22, 2001
Filing Date:
March 16, 1992
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G01T1/20; G01T1/24; H01L31/09; (IPC1-7): G01T1/20; G01T1/24; H01L31/09
Domestic Patent References:
| JP373883A | ||||
| JP3276089A | ||||
| JP522777A | ||||
| JP6078376A | ||||
| JP63224253A | ||||
| JP4130292A |
Attorney, Agent or Firm:
Taiji Shinohara (1 person outside)