Title:
Solar cell manufacturing method
Document Type and Number:
Japanese Patent JP6360250
Kind Code:
B2
Abstract:
In the present invention, a p-type silicon substrate is produced, a solution containing aluminum is misted, and the misted solution is sprayed onto the back surface of the p-type silicon substrate under non-vacuum to form a back surface passivation film made of the aluminum oxide film on the back surface of the p-type silicon substrate. Thereafter, a light irradiation processing in which an interface between the p-type silicon substrate and the back surface passivation film is irradiated with ultraviolet light is performed.
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Inventors:
Takahiro Hiramatsu
Oda
Oda
Application Number:
JP2017504450A
Publication Date:
July 18, 2018
Filing Date:
March 09, 2015
Export Citation:
Assignee:
Toshiba Mitsubishi Electric Industrial Systems Co., Ltd.
International Classes:
H01L31/0216; H01L21/316; H01L31/068; H01L31/18
Domestic Patent References:
JP2006080474A | ||||
JP2005029408A | ||||
JP5259156A | ||||
JP63206372A |
Foreign References:
WO2015004767A1 | ||||
WO2011155635A1 | ||||
WO2013180855A1 | ||||
WO2010035313A1 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita