PURPOSE: To prevent step discontinuity from occurring when a light shielding film is formed by providing a notch to the part of an upper layer electrode which corresponds to side parts in order that side parts overlapping does not exist.

CONSTITUTION: The section, situated over a transfer electrode 30B, of the side situated on the side of an extention line of the corresponding side of the transfer electrode 30B of the first layer, in both sides of a transfer electrode 30A of the second layer (the sides parallel to an electric charge transferring path 35) is cut out so as to form a natch 40. As a result, the section, where the notch is provided, forms a step from the transfer electrode 30B. This step is a new step formed from a conventional comparatively large step. So, due to this new step, conventional comparatively large step disappers. For that reason, even if a light shielding film 28 is formed over the upper layer of that section, the light shielding film 28 does not produce step discontinuity.