To a solid-liquid separator, even which is a simple constitution, capable of certainly separating, and recovering, particles from a treated liquid mixing particles of a substrate, and to provide a substrate treating apparatus equipped with this solid-liquid separator.
The separator includes a storage tank 12 storing a treated liquid mixing particles, a defoaming tank 13, an exhaust gas damper 32 exhausting gas in the defoaming tank 13, a connecting pipe passage 14 connecting the storage tank 12 and the defoaming tank 13, a surfactant storage tank 15 storing a surfactant, a gas feed passage 46 making gas mix in circulation passage of the treated liquid consisting of a mixing nozzle 31 and a circulation pipe passage 47, a vacuum pump 29 decompressing a space in the defoaming tank 13, and a heater 33 heating the inner space of the defoaming tank 13.
YAMASHITA EIJI
JODAI KAZUO
YAMAMOTO SATOSHI
