Title:
SOLID LUBRICATING FILM FOR VACUUM, ITS MANUFACTURING METHOD, AND VACUUM EQUIPMENT
Document Type and Number:
Japanese Patent JP2005350584
Kind Code:
A
Abstract:
To provide a solid lubricating film which does not require film-forming processes for CVD, PVD, etc., does not require grinding for making a smooth surface, does not require an additional heating process, exhibits high lubricating property in high vacuum, and consists only of carbon.
A solid lubricant and the solid lubricating film for vacuum consist of diamond particles having an average particle size of <100 nm. The manufacturing method is provided for the solid lubricating film for vacuum, wherein a deposition film, essentially comprising <100 nm sized diamond particles, is formed on a frictional surface by a high-speed argon gas spraying method, a thermal spray method, or a volatile solvent applying method.
More Like This:
Inventors:
USUHA SHIYUU
KAKUDATE YOUZOU
ANNA GUBAREVICH
KAKUDATE YOUZOU
ANNA GUBAREVICH
Application Number:
JP2004173732A
Publication Date:
December 22, 2005
Filing Date:
June 11, 2004
Export Citation:
Assignee:
NAT INST OF ADV IND & TECHNOL
International Classes:
C10M103/02; C10M171/06; C10M177/00; C23C4/04; C23C26/00; C10N20/06; C10N50/08; C10N70/00; (IPC1-7): C10M103/02; C10M171/06; C10M177/00
Domestic Patent References:
| JP2002363616A | 2002-12-18 | |||
| JPH11157818A | 1999-06-15 | |||
| JP2002080212A | 2002-03-19 | |||
| JPS566920A | 1981-01-24 | |||
| JPH06116577A | 1994-04-26 |
Previous Patent: CORROSION INHIBITOR COMPOSITION
Next Patent: CROSS-LINKED HETEROCYCLIC POLYMER AND FIBER FORMED BODY FROM THE SAME
Next Patent: CROSS-LINKED HETEROCYCLIC POLYMER AND FIBER FORMED BODY FROM THE SAME