Title:
固体撮像装置およびその製造方法、並びに電子機器
Document Type and Number:
Japanese Patent JP7013209
Kind Code:
B2
Abstract:
There is provided an imaging device with a semiconductor substrate having a first side and a second side opposite the first side. A photoelectric conversion unit is on the first side of the semiconductor substrate. A multilayer wiring layer is on the second side of the semiconductor substrate. A through electrode extends between the photoelectric conversion unit and the multilayer wiring layer. The multilayer wiring layer includes a local wiring layer. A second end of the through electrode is in direct contact with the local wiring layer.
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Inventors:
Junpei Yamamoto
Takushi Shigetoshi
Takanobu Tada
Shimpei Fukuoka
Takushi Shigetoshi
Takanobu Tada
Shimpei Fukuoka
Application Number:
JP2017217217A
Publication Date:
January 31, 2022
Filing Date:
November 10, 2017
Export Citation:
Assignee:
Sony Semiconductor Solutions Corporation
International Classes:
H01L21/768; H01L27/146; H01L23/522; H04N5/369; H04N5/374
Domestic Patent References:
JP2015053296A | ||||
JP2006269923A | ||||
JP2016029731A | ||||
JP201512126A |
Attorney, Agent or Firm:
Takashi Nishikawa
Yoshio Inamoto
Yoshio Inamoto
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