To provide a cleaning method to remove the residual chemicals safely and effectively at a manifold to deliver high purity chemicals by using a solvent.
This is a method to clean a manifold which delivers high purity raw material chemicals from a high purity raw material chemicals container to the place where they are used after the delivery of the high purity raw material chemicals is suspended. This cleaning method includes processes to exhaust the manifold by connecting to a vacuum source, to finish the exhaust, to introduce at least one solvent for high purity raw material chemicals from at least one source of at least one solvent to the manifold, to dissolve residual high purity raw material chemicals in the manifold into at least one solvent, to discharge the obtained mixture of residual high purity raw material chemicals and the solvent from the manifold, and to purge the manifold by connecting to an inert gas source.
LEI XINJIAN
SILVA DAVID JAMES
TRENT CYNTHIA LEE
