Title:
SPATIAL LIGHT MODULATION UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF PRODUCING DEVICE
Document Type and Number:
Japanese Patent JP2016130859
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a spatial light modulation unit used for an illumination optical system capable of improving a degree of freedom concerning an intensity level of a pupil intensity distribution.SOLUTION: The spatial modulation unit used for an illumination optical system which illuminates a face to be illuminated with light from a light source includes: a spatial light modulator having a plurality of optical elements arrayed in a predetermined plane and controlled individually; a spatial light modulation element for spatially modulating the light entered from the light source to irradiate each of a plurality of the optical elements with a flux of light having an intensity level corresponding to a position thereof; and a control unit for controlling individually a plurality of the light elements on the basis of information concerning a light intensity level of a flux of light entering into each of a plurality of the optical elements.SELECTED DRAWING: Figure 2
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Inventors:
TANITSU OSAMU
Application Number:
JP2016023264A
Publication Date:
July 21, 2016
Filing Date:
February 10, 2016
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; G02B19/00; G02B26/02
Domestic Patent References:
| JP2014165632A | 2014-09-08 | |||
| JP2009105206A | 2009-05-14 | |||
| JP2009105396A | 2009-05-14 | |||
| JP2009272624A | 2009-11-19 |
Foreign References:
| WO2009128293A1 | 2009-10-22 | |||
| WO2009060744A1 | 2009-05-14 | |||
| WO2009150871A1 | 2009-12-17 | |||
| WO2009087805A1 | 2009-07-16 |
Attorney, Agent or Firm:
Takao Yamaguchi