Title:
SPECIMEN TEMPERATURE CONTROL METHOD AND VACUUM TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3269781
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To always control precisely the temperature of a specimen to be vacuum- treated, and facilitate the vacuum treatment of the specimen, by intermittently supplying heat transfer gas, and adjusting the pressure of the heat transfer gas.
SOLUTION: A heat transfer gas supply route 140 is formed in a specimen stand shaft 60 and a specimen stand 61. One end of a heat transfer gas guide pipe 141 communicate with the other end of the transfer gas supply route 140 and connected with the specimen stage shaft 60, and the other end of the pipe 141 is connected with a heat transfer gas source 142. A specimen 70 is arranged and fixed on the specimen setting surface of the specimen stage 61 which is installed under a low pressure and cooled or heated. The temperature of the specimen 70 is controlled by introducing the heat transfer gas into the part between the back of a fixed specimen 70 and the specimen setting surface of the specimen stand 61. In particular, the heat transfer gas is intermittently supplied, and its pressure is adjusted. Thereby the temperature of the specimen 70 set on the specimen setting surface of the specimen stage 61 in a vacuum can be always controlled with high precision, and vacuum treatment is excellently enabled.
Inventors:
Yoichi Ito
Application Number:
JP34710596A
Publication Date:
April 02, 2002
Filing Date:
December 26, 1996
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
B01J3/00; C23F4/00; H01L21/203; H01L21/205; H01L21/302; H01L21/3065; H01L21/68; H01L21/683; (IPC1-7): H01L21/3065; B01J3/00; C23F4/00; H01L21/203; H01L21/205; H01L21/68
Domestic Patent References:
| JP63124416A | ||||
| JP63229716A |
Attorney, Agent or Firm:
Yasuo Sakuta