Title:
SPECTROSCOPIC INSTRUMENT
Document Type and Number:
Japanese Patent JP2023096464
Kind Code:
A
Abstract:
To provide a spectroscopic instrument capable of obtaining wavelength data for measurement light with high accuracy.SOLUTION: A spectroscopic instrument 1A is provided with: a fluctuating element 2 having a fluctuating surface 2a; a diffraction grating 3 for spectrally dispersing measurement light L1 reflected by the fluctuating surface 2a; a first light detecting unit 4 including a first photodetector 41 for detecting a part of the measurement light L1 spectrally dispersed by the diffraction grating 3; a light source 5 for projecting inspection light L2; and a second light detecting unit 6 including a second photodetector 61A for detecting the inspection light L2 reflected by the fluctuating surface 2a. The fluctuating element 2 includes a supporting portion, a movable portion having the fluctuating surface 2a, and a connecting portion connecting the supporting portion and the movable portion so that a deflection angle of the fluctuating surface 2a changes around an axis line A as a center line. The second light detecting unit 6 has an elongated light receiving area 60 whose longitudinal direction is a direction D which is the moving direction of the inspection light L2.SELECTED DRAWING: Figure 1
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Inventors:
NOZAKI SHIN
SAKURAI NAOTO
IWASAKI NORIHIRO
SAKURAI NAOTO
IWASAKI NORIHIRO
Application Number:
JP2021212258A
Publication Date:
July 07, 2023
Filing Date:
December 27, 2021
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
G01J3/06; G01J3/18; G01J3/32
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama