Title:
分光エリプソメータ
Document Type and Number:
Japanese Patent JP4358982
Kind Code:
B2
Abstract:
The present invention provides a spectral ellipsometer with which it is possible to easily focus all optical axes of multiwavelengths onto one spot by means of a remarkably simple and rational improved technique. The present invention is a spectral ellipsometer, which is constituted of a light incidence optical system for achieving spot incidence of polarization light of multiwavelengths onto a sample surface and a detecting optical system for outputting information concerning the sample surface based on an amount of change in polarization of elliptical polarization reflected by the sample surface, wherein a polarizer employed in the above light incidence optical system is a prism with a shape of a light-incident surface and light-outgoing surface thereof being a curved surface that is orthogonal with respect to a progressing direction of the respective directions of incident and outgoing light.
Inventors:
Kunio Otsuki
Yuu Saijo
Yuu Saijo
Application Number:
JP2000325362A
Publication Date:
November 04, 2009
Filing Date:
October 25, 2000
Export Citation:
Assignee:
HORIBA, Ltd.
International Classes:
G01B11/06; G01J4/04; G01N21/21; G01N21/41; G02B5/04; G02B27/28
Domestic Patent References:
| JP7146212A | ||||
| JP6147987A | ||||
| JP11101739A | ||||
| JP9222563A | ||||
| JP59228611A |
Attorney, Agent or Firm:
Hideo Fujimoto
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