Title:
SPECTRUM DISPERSION MEMS SELF-TESTING SYSTEM AND METHOD
Document Type and Number:
Japanese Patent JP2014174175
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a MEMS sensor that has a spectrum dispersion modulation self-testing capability.SOLUTION: A MEMS sensor comprises: a detection circuit 106 that is configured so as to detect a stimulant generated by a microelectromechanical system 102 in a sensor band width of a device output signal; and a self-test circuit 112 that generates a test output signal 130 indicative of a status of the microelectromechanical system 102 by injecting a self-test signal 114 in a signal route of the microelectromechanical system 102 including a MEMS structure having something to do with a generation of the stimulant in the sensor band width of the device output signal. The self-test signal 114 is a spectrum dispersion signal that has a test signal band width overlapped with at least one part of the sensor band width.
Inventors:
KAMATCHI SARAVANAN ALAGARSAMY
WILLIAM A CLARK
JISHNU CHOYI
JAMES M LEE
VIKAS CHOUDHARY
WILLIAM A CLARK
JISHNU CHOYI
JAMES M LEE
VIKAS CHOUDHARY
Application Number:
JP2014044971A
Publication Date:
September 22, 2014
Filing Date:
March 07, 2014
Export Citation:
Assignee:
ANALOG DEVICES TECHNOLOGY
International Classes:
G01C19/5776; G01P21/00; G01D21/00; G01R31/28
Domestic Patent References:
| JP2013502581A | 2013-01-24 | |||
| JP2013502581A | 2013-01-24 |
Foreign References:
| US20100145660A1 | 2010-06-10 | |||
| US20100145660A1 | 2010-06-10 |
Attorney, Agent or Firm:
Shusaku Yamamoto
Natsuki Morishita
Takatoshi Iida
Daisuke Ishikawa
Kensaku Yamamoto
Natsuki Morishita
Takatoshi Iida
Daisuke Ishikawa
Kensaku Yamamoto