Title:
スピンコート装置
Document Type and Number:
Japanese Patent JP4117843
Kind Code:
B2
Inventors:
Inaya Kosuke
Application Number:
JP2003429087A
Publication Date:
July 16, 2008
Filing Date:
December 25, 2003
Export Citation:
Assignee:
Origin Electric Co., Ltd.
International Classes:
B05C11/00; G11B7/26; B05C11/08; B05C11/10
Domestic Patent References:
| JP58089966A | ||||
| JP11165115A | ||||
| JP2000176352A |
Attorney, Agent or Firm:
Shinichi Kawakubo