PURPOSE: To apply a resin liquid uniformly to a square substrate.

CONSTITUTION: A square substrate 3 is fixed on the upper face of a rotary table 1 and a resin liquid 4 dropped on the center of the substrate 3 is spread to the substrate 3 by rotation of the rotary table 1 and, simultaneously, a gas 11 with almost the same speed as the rotating speed of the substrate 3 is blown to the surface of the substrate 3 toward the same direction as the rotary direction of the rotary table 1.