SPINDLE MOVING MECHANISM OF DICING APPARATUS

Title:

SPINDLE MOVING MECHANISM OF DICING APPARATUS

Document Type and Number:

Japanese Patent JP2000343523

Kind Code:

A

Abstract:

To provide the spindle moving mechanism of a dicing apparatus which is compact and simple in structure.

A spindle fitted with a blade is mounted on each of two Y-shaft carriages 50A, 50B. The carriages 50A, 50B are installed freely slidably on Y-shaft guide rails 46, 46 of a pair. When a screw rod 56 is rotated by a screw rod driving motor 64, the carriages 50A, 50B move in the same direction and in the same quantity of movement. When a nut 66B is rotated by a hollow motor 68 fitted to the carriage 50B, the carriage 50B alone is moved.

Inventors:

SAKATANI YASUYUKI
AZUMA MASAYUKI
ADACHI TEI

Application Number:

JP15782399A

Publication Date:

December 12, 2000

Filing Date:

June 04, 1999

Export Citation:

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Assignee:

TOKYO SEIMITSU CO LTD
SEIKO SEIKI KK

International Classes:

B24B27/06; B28D5/02; H01L21/301; (IPC1-7): B28D5/02; B24B27/06; H01L21/301

Attorney, Agent or Firm:

Kenzo Matsuura

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