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Title:
SPLIT FIELD MICROSCOPE
Document Type and Number:
Japanese Patent JPS5280040
Kind Code:
A
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Inventors:
MORI YOSHIAKI
Application Number:
JP15670775A
Publication Date:
July 05, 1977
Filing Date:
December 26, 1975
Export Citation:
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Assignee:
KOKUSAI ELECTRIC CO LTD
International Classes:
G02B21/00; G02B21/18; G02B27/02; G02B27/18; H01L21/00; H01L21/301; (IPC1-7): G02B21/00; G02B27/02; G02B27/18; H01L21/00



 
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