Title:
スポット形状検出装置
Document Type and Number:
Japanese Patent JP6799470
Kind Code:
B2
Abstract:
A spot shape detection apparatus for detecting the spot shape of a laser beam oscillated from a laser oscillator includes: a focusing leans for focusing the laser beam oscillated by the oscillator; a rotary body (mirror holder) in which a plurality of mirrors for reflecting the laser beam having passed through the focusing lens are disposed on concentric circles; a drive source (motor) for rotating the rotary body at a predetermined period; a beam splitter for branching return beams of the laser beam reflected by the plurality of mirrors of the rotary body; an imaging unit which is disposed in a direction in which the return beams are branched by the beam splitter and which images spot shapes of the return beams; and a display unit for displaying images obtained by imaging by the imaging unit, in relation with the plurality of mirrors.
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Inventors:
Keiji Nohmaru
Osaki Arata
Nakamoto Akira
Osaki Arata
Nakamoto Akira
Application Number:
JP2017010376A
Publication Date:
December 16, 2020
Filing Date:
January 24, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23K26/00; G01B11/08; G01B11/24; H01S3/00
Domestic Patent References:
| JP2013527979A | ||||
| JP201641437A |
Foreign References:
| US6313910 |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Kojino Koji
Yoshifumi Kaneko
Sachiko Okunuki
Kojino Koji
Yoshifumi Kaneko