PURPOSE: To enhance the utilization efficiency of a target and to make the thickness distribution of a film uniform, by circularly arranging plural pairs of magnetic poles on the rear side of the target so that the distribution of magnetic fields on the target is made uniform.

CONSTITUTION: Plural pairs of magnetic poles 6a, 6b are circularly arranged on the rear side of a target 5 and a magnetic field is formed from the center of the target 5 in the radial directions. Accordingly, magnetic fields are formed not only in the circumferential direction of the target 5 but also in directions perpendicular to the radial directions, so the distribution of magnetic fields on the target 5 is made uniform, local consumption of the target 5 is prevented and the utilization efficiency of the target 5 is enhanced. Particles generated by sputtering deposit uniformly on a substrate and a thin film having a uniform thickness distribution is obtd.