To prevent color irregularity from occurring in a color filter.

A mask 5 as a counterpart to a color filtering substrate 3, the color filtering substrate 3 and a mask holder 1 having a prescribed number of through-holes 14 are laid one upon another to make a substrate set, and a substrate set carrier 30 is provided to support the set. There is also provided a lid component 18 which blocks through-holes 14 of the mask holder 1 supported by the substrate set carrier 30 and releases such blockade of the holes as necessary. The lid component 18 has bosses 32 and a flange 33, the former fitting in the through-holes 14 of the mask holder 1 while the latter overlapping the mask holder 1. The thickness of the flange 33 is defined to be about a half or more of that of the mask holder 1.