Title:
スパッタリング装置
Document Type and Number:
Japanese Patent JP4435835
Kind Code:
B2
Inventors:
Tsukasa Kobayashi
Kazuo Hirata
Kazuo Hirata
Application Number:
JP2008043092A
Publication Date:
March 24, 2010
Filing Date:
February 25, 2008
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
H01F41/18; C23C14/14; C23C14/24; C23C14/34; C23C14/50; C23C14/56; H01F7/20
Domestic Patent References:
| JP3087365A | ||||
| JP8085871A | ||||
| JP7031853U | ||||
| JP5247644A | ||||
| JP7166347A | ||||
| JP8088424A | ||||
| JP62205270A |
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi