PURPOSE: To provide a sputtering target for thin film deposition for DC magnetron sputtering by incorporating a specific amount of yittrium.
CONSTITUTION: After dissolving an organic binder (e.g. polyphenylene, phenol) in a solvent, a slurry is prepared by admixing yittria powders thereto. Allowing the solvent to evaporate from the slurry, a thin coating of organic binder is left on the particles of yittria powders. Unprocessed articles in a specified shape are produced by drying and compressing, and are subjected to heating thereby decomposing the organic binder. By heating the unprocessed articles under a non-oxidizing atmosphere for converting the thermally decomposed organic binder into amorphous carbon, the electroconductive sputtering target is produced. It is so arranged that 35 vol.% of yittria in respect to the total volume of the target is contained.
JIEEMUZU PATORITSUKU MAZAAZU
MAIKERU BERII HINTSU
