Title:
SPUTTERING TARGET MATERIAL OF GLASSY CARBON
Document Type and Number:
Japanese Patent JP2001140062
Kind Code:
A
Abstract:
To produce a sputtering target material made of glassy carbon for depositing a carbon protective film having high strength and high hardness and capable of corresponding to film-thinning.
This sputtering target material made of glassy carbon contains gaseous hydrogen and gaseous nitrogen by ≥50 ppm weight in total.
Inventors:
SUZUKI TAKAYUKI
SAITO SHOICHI
SAITO SHOICHI
Application Number:
JP32398999A
Publication Date:
May 22, 2001
Filing Date:
November 15, 1999
Export Citation:
Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
C01B31/02; C23C14/34; (IPC1-7): C23C14/34; C01B31/02
Attorney, Agent or Firm:
Kunihiko Wakabayashi
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