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Title:
スパッタリング用ターゲット及び透明導電ガラス並びに透明導電フィルム
Document Type and Number:
Japanese Patent JP4230594
Kind Code:
B2
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Inventors:
Kazuyoshi Inoue
Application Number:
JP5838599A
Publication Date:
February 25, 2009
Filing Date:
March 05, 1999
Export Citation:
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Assignee:
IDEMITSU KOSAN CO.,LTD.
International Classes:
C04B35/00; C23C14/34; C23C14/08; H01B5/14
Domestic Patent References:
JP3150252A
JP6234565A
Attorney, Agent or Firm:
Tamotsu Otani
Masamichi Tohei



 
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