PURPOSE: To prevent a squeezing diaphragm from center-shifting and declining by installing guide projected parts in a reinforcing plate of the squeezing diaphragm and guide recessions which fit for the projected parts in a substrate.
CONSTITUTION: Guide projected parts 4 (4A, 4B) projected backward in a direction parallel to an axial line are formed on reinforcing plates 3 (3A, 3B) of squeezing diaphragm 2 (2A, 2B) and guide recessions 6 (6A, 6B) to fix the projected parts are formed on a squeezing filtration substrate 5. Since the weight of the squeezing diaphragm 2 (2A,2B) is supported by fixing the guide projected parts 4 (4A, 4B) and the guide recessions 6 (6A, 6B), the center-shift due to elongation of a reference distance A by stretching out of a periphery band region of an upper side flexible thin film is prevented and owing to the functions of the guides, the squeezing diaphragm 2 (2A, 2B) maintains its posture of keeping rectangularity to the axial line direction and is movable to parallel direction of the axial line.
SANO SHIGERU
MUROI OSAMU
HAMAZAKI HARUO
NAKAMURA MASAYUKI
KURITA MACHINERY MANUF
| JPS6257622A | 1987-03-13 |