Title:
STABILIZATION OF COMPOUND SEMICONDUCTOR SURFACE
Document Type and Number:
Japanese Patent JPH02284422
Kind Code:
A
Abstract:
PURPOSE: To contrive the stabilization of a surface by treating its surface with a solution of an organic solvent of sulfur.
CONSTITUTION: A compound semiconductor substrate made of gallium sulfide and the like is immersed in a solution of xylene, aromatic hydrocarbon, and halogenated aromatic hydrocarbon containing 5% of sulfur in 10min. or more at the temp. of 80°C and its organic solvent is evaporated by applying ultraviolet rays to form a film of sulfur. Its film is allowed to stand in a reduced pressure atmosphere in 30min. and sulfur is combined strongly with the surface of the above film. The surface is thus stabilized.
Inventors:
NANNICHI YASUO
KATAYAMA YOSHIFUMI
YAMADA MASAMICHI
KATAYAMA YOSHIFUMI
YAMADA MASAMICHI
Application Number:
JP10447689A
Publication Date:
November 21, 1990
Filing Date:
April 26, 1989
Export Citation:
Assignee:
NANNICHI YASUO
HIKARI GIJUTSU KENKYU KAIHATSU
HIKARI GIJUTSU KENKYU KAIHATSU
International Classes:
C30B33/00; H01L21/205; H01L21/304; (IPC1-7): C30B33/00; H01L21/304
Attorney, Agent or Firm:
Tan Ashida (2 outside)
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