Title:
STABILIZATION OF FET SENSOR
Document Type and Number:
Japanese Patent JPS5428197
Kind Code:
A
Inventors:
YANO MAKOTO
SHIMADA KIYOO
SHIBATANI JIYUNICHIROU
MAKIMOTO TSUTOMU
SHIMADA KIYOO
SHIBATANI JIYUNICHIROU
MAKIMOTO TSUTOMU
Application Number:
JP9428277A
Publication Date:
March 02, 1979
Filing Date:
August 04, 1977
Export Citation:
Assignee:
KURARAY CO
International Classes:
G01N27/00; G01N27/12; G01N27/414; H01L29/76; H01L29/78; (IPC1-7): G01N27/12; H01L29/76