Title:
STAGE DEVICE, ALIGNER AND STAGE DRIVING METHOD
Document Type and Number:
Japanese Patent JP2004087832
Kind Code:
A
Abstract:
To provide a stage device where damage to a plate due to a contact with a fluid bearing can be prevented and to provide an aligner and a stage driving method.
In a moving stage 6, the wafer stage plate is floating-supported with four fluid bearings 67A to 67D. Pipings 7A to 7D supplying fluids to the bearins are connected to the fluid bearings 67A to 67D. Flowmeters 90A to 90D are installed especially in the pipings 7A to 7D.
Inventors:
KUBOTA YASUHITO
Application Number:
JP2002247410A
Publication Date:
March 18, 2004
Filing Date:
August 27, 2002
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/22; H01L21/027; H01L21/68; (IPC1-7): H01L21/027; G03F7/22; H01L21/68
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi