Title:
STAGE DEVICE, LITHOGRAPHY DEVICE, AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2017111243
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique that is advantageous in terms of the dustproof performance of a stage device.SOLUTION: A stage device disposed in an inner side of a chamber includes: a chuck configured to be movable while holding an object; a drive mechanism movable part which configures a driving mechanism for driving the chuck and changes its shape or moves in accordance with the move of the chuck; and a cover which covers a projected part of the drive mechanism movable part and expands/contracts in accordance with the move of the chuck. The cover has an outer cover and an inner cover inserted into an inner side of the outer cover, and it is configured to expand/contract by sliding actions of the outer cover or the inner cover in accordance with the move of the chuck. Further, in the stage device, an exhaust hole for communicating the inner side of the cover with an outer side of the chamber and a suction hole for communicating the inner side of the cover with the inner side of the chamber are formed.SELECTED DRAWING: Figure 3
Inventors:
YUASA TAKAHITO
Application Number:
JP2015244395A
Publication Date:
June 22, 2017
Filing Date:
December 15, 2015
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; H01L21/683
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu