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Patent Searching and Data


Title:
STAGE DEVICE
Document Type and Number:
Japanese Patent JP2011152590
Kind Code:
A
Abstract:

To provide a high quality stage device by installing a weight supported movably relative to the body to be supported in the direction parallel to the second direction.

This stage device includes a base 10, the body to be supported which is supported on the base movably relative to the base in the direction parallel to a first direction, a table supported on the body to be supported movably relative to the body to be supported in the direction parallel to the second direction which crosses the first direction, and the weight 18 supported on the body to be supported movably relative to the body to be supported in the direction parallel to the second direction.


Inventors:
ENNYU NAOAKI
Application Number:
JP2010013746A
Publication Date:
August 11, 2011
Filing Date:
January 26, 2010
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
B23Q11/00; B23K26/10; B23Q1/62; B23Q1/72; F16F15/02
Domestic Patent References:
JPH01301038A1989-12-05
JPS6316934A1988-01-23
JPH02152740A1990-06-12
Attorney, Agent or Firm:
Keishiro Takahashi
Mikio Kuruyama
Ukai Shinichi