Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ステージ装置
Document Type and Number:
Japanese Patent JP3746730
Kind Code:
B2
More Like This:
JP3434327ELECTROMECHANICAL DISPLACER
JPS5960615MECHANISM FOR ADJUSTING ECCENTRIC QUANTITY AND CONVERTING DISPLACEMENT
Inventors:
Tokushima Shinobu
Application Number:
JP2002122508A
Publication Date:
February 15, 2006
Filing Date:
April 24, 2002
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Mejiro Precision Co., Ltd.
International Classes:
G05D3/00; G12B5/00; B23Q1/00; B23Q1/44; B23Q1/48; B23Q16/02; H01L21/027
Domestic Patent References:
JP8099243A
JP2001022448A
JP8025163A
Attorney, Agent or Firm:
Akira Kaneki
Hajime Tsukuni
Koshiro Tsukuda



 
Previous Patent: METHOD FOR DETECTING DETERIORATION OF APPARATUS

Next Patent: FERRITE CORE