Title:
ステージ装置
Document Type and Number:
Japanese Patent JP4443891
Kind Code:
B2
Abstract:
A stage device has guide members (2, 3) for guiding each of two moving bodies (4, 5) in one axis direction on a level block (1) and has a beam (6) laid across the two moving bodies (4, 5) so as to be perpendicular to the guide members (2, 3) and moving together with the moving bodies (4, 5). The two moving bodies (4, 5) are individually moved to rotate the beam (6) relative to a yaw rotation axis perpendicular to the one axis direction.
Inventors:
Tatsuro Kato
Kazuharu Utsumi
Hiroshi Murayama
Hidehiko Mashita
Kazuharu Utsumi
Hiroshi Murayama
Hidehiko Mashita
Application Number:
JP2003363581A
Publication Date:
March 31, 2010
Filing Date:
October 23, 2003
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B23Q5/34; G05B19/404; B23Q1/00; B23Q1/25; B23Q5/28; B23Q17/00; G03F7/20; G05B19/18
Domestic Patent References:
| JP2001022448A | ||||
| JP2000065970A | ||||
| JP61117034A | ||||
| JP2003025178A | ||||
| JP2000029530A | ||||
| JP2004009176A |
Attorney, Agent or Firm:
Kenho Ikeda