To reduce fully breakage capabilities in the case of equipment of large dimension, in a method of metering high energy ray in three dimensions, and to provide a steric instrumentation system of energy ray which can reduce fully breakage capabilities in the case of large dimension.

A sensor stack member 4 is constituted by arranging two-dimensional CCD sensors 6 so that a layered state may be made. The plurality of sensor stack members 4 are prepared and arranged in the two-dimensional direction of the two-dimensional CCD sensors 6. By using each of the CCD sensors 6, intensity and position of an incident energy ray are measured. Based on the measurement results, a trajectory and/or energy of the energy ray is computed with an arithmetic unit 12.