Title:
STORAGE CABINET APPARATUS OF WAFER FRAME STORAGE BOX
Document Type and Number:
Japanese Patent JP2006135283
Kind Code:
A
Abstract:
To permit quicker and more secure access of a wafer frame storage box by using a first module to store the wafer frame storage box.
A storage cabinet apparatus is used for storage of a wafer frame storage box 21. The storage cabinet apparatus 20 includes a storage cabinet body 22, a first module 23 installed in the storage cabinet body 22 and storing the wafer frame storage box 21, and a control cabinet 24 installed in the storage cabinet body 22 and displaying the information on the use of the wafer frame storage box 21 by controlling the first module 23.
Inventors:
LIU YU CHUAN
Application Number:
JP2005112599A
Publication Date:
May 25, 2006
Filing Date:
April 08, 2005
Export Citation:
Assignee:
POWER GEODE TECHNOLOGY CO LTD
International Classes:
H01L21/673; A47B81/00; B65G1/137
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama