Title:
ペリクル用収納容器
Document Type and Number:
Japanese Patent JP4614845
Kind Code:
B2
Inventors:
Toshitsugu Yajima
Wataru Kikuchi
Wataru Kikuchi
Application Number:
JP2005233018A
Publication Date:
January 19, 2011
Filing Date:
August 11, 2005
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
B65D85/86; G03F1/62; G03F1/66
Domestic Patent References:
| JP10048812A | ||||
| JP2001092113A | ||||
| JP2004361649A | ||||
| JP6019124A | ||||
| JP7304111A | ||||
| JP10114388A | ||||
| JP2003107679A | ||||
| JP2001100394A |
Attorney, Agent or Firm:
Iat International Patent Business Corporation