To enable arrangement in a small space along a track, facilitate maintenance work and efficiently store/retrieve loads or efficiently carry the loads inside storages by a simple configuration, in a storage set comprising, in particular, a combination of a plurality of storages such as stockers for temporarily storing loads for storing various types of substrates for semiconductor device manufacturing in a position adjacent to the track.
In the storage set 10x constituted by combining the plurality of storages 10, each of the storages 10 is provided with a drive means capable of reciprocating a load 3 in one horizontal direction and of reciprocating the load 3 in the vertical direction; and with a shelf 15 having shelf portions on which the load 3 moved by the drive means can be stored/placed at a plurality of stages in the vertical direction so that one or more than one of the shelf portions are arranged in one horizontal direction at each of the stages. The plurality of storages 10 are arranged so that the one horizontal directions of the storages 10 are aligned and storing/retrieving ports form a line.
YAMAJI TAKASHI
JPH10250836A | 1998-09-22 | |||
JPH09315521A | 1997-12-09 | |||
JPH11310306A | 1999-11-09 |
Satoshi Nakamura
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