Title:
STRAIN MEASURING APPARATUS FOR QUARTZ GLASS CRUCIBLE
Document Type and Number:
Japanese Patent JP2017202974
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To measure the strain distribution of an entire quartz glass crucible nondestructively.SOLUTION: A strain measuring apparatus comprises: a light source 11 for lighting a quartz glass crucible 1 from the outer side; a first polarizer 12 and a first 1/4 wavelength plate 13 arranged between the light source 11 and the outer surface of the wall body of the quartz glass crucible 1; a camera 14 arranged on the inner side of the quartz glass crucible 1; a camera controlling mechanism 15 for controlling the imaging direction of the camera 14; and a second polarizer 16 and the second 1/4 wavelength plate 17 arranged between the camera and the inner surface of the wall of the quartz glass crucible 1. The optical axis of the second 1/4 wavelength plate 17 of the camera 14 is inclined by 90 degrees with respect to the optical axis of the first 1/4 wavelength plate 13. The camera 14 photographs the light which is projected from the light source 11 and has passed through the first polarizer 12 and the first 1/4 wavelength plate 13, the wall body of the quartz glass crucible 1, the second 1/4 wavelength plate 17, and the second polarizer 16.SELECTED DRAWING: Figure 1
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Inventors:
SUDO TOSHIAKI
SATO TADAHIRO
KITAHARA KEN
KITAHARA ERIKO
SATO TADAHIRO
KITAHARA KEN
KITAHARA ERIKO
Application Number:
JP2017123012A
Publication Date:
November 16, 2017
Filing Date:
June 23, 2017
Export Citation:
Assignee:
SUMCO CORP
International Classes:
C30B29/06; C03B20/00; G01N21/17; G01N21/23; G01N21/27
Attorney, Agent or Firm:
Ichiro Nomura