Title:
STRAIN RESISTANCE FILM AND STRAIN SENSOR, AND MANUFACTURING METHOD OF THEM
Document Type and Number:
Japanese Patent JP2018091848
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a strain resistance film and strain sensor having a high gauge factor and high temperature stability in a predetermined high-temperature region, and provide manufacturing methods of them.SOLUTION: A strain resistance film is obtained which is expressed by a general formula CrAlN(here, x and y are atomic ratios (at.%), 4≤x≤25, and 0.1≤y≤20) and has a gauge factor of 3 or more in a temperature range of -50°C or more and 300°C or less. A strain sensor is obtained by forming the strain resistance film on a strain structure. At this time, the strain resistance film is manufactured by applying a heat treatment to a thin film having the above-mentioned composition at a temperature of 300°C or more and 700°C or less.SELECTED DRAWING: Figure 7
Inventors:
NIWA EIJI
Application Number:
JP2017231649A
Publication Date:
June 14, 2018
Filing Date:
December 01, 2017
Export Citation:
Assignee:
RES INSTITUTE FOR ELECTROMAGNETIC MATERIALS
International Classes:
G01B7/16; C23C14/06; H01C7/00; H01C17/12
Attorney, Agent or Firm:
Hiroshi Takayama
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