Title:
プラズマ火炎熱処理を用いたプラズマ溶射コーティングの強化
Document Type and Number:
Japanese Patent JP6749238
Kind Code:
B2
Abstract:
A method for forming a plasma resistant ceramic coating on an article includes placing the article into a chamber or spray cell of a plasma spraying system. A ceramic powder is then fed into the plasma spraying system at a powder feed rate, and a plasma resistant ceramic coating is deposited onto at least one surface of the article in a plasma spray process by the plasma spray system. The plasma spray system is then used to perform an in-situ plasma flame heat treatment of the plasma resistant ceramic coating to form crust on the plasma resistant ceramic coating.
Inventors:
San Jennifer Wye
Chen Ekai
Canungo Vila Japee
Chen Ekai
Canungo Vila Japee
Application Number:
JP2016543976A
Publication Date:
September 02, 2020
Filing Date:
September 17, 2014
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C4/18; B05D1/10; C04B35/50; C04B41/87; C23C4/11; C23C4/134
Domestic Patent References:
| JP2009176787A | ||||
| JP2010121211A | ||||
| JP2011514933A | ||||
| JP2009161846A | ||||
| JP2007217779A | ||||
| JP2012067364A | ||||
| JP2007070175A |
Attorney, Agent or Firm:
Yoshiaki Anzai