To provide a stripper for color resist, containing no metal ions while suppressing corrosion of metal (especially aluminum), and having excellent color resist strippability.
This stripper for color resist contains water, quaternary ammonium hydroxide [B], alkanolamine [C], trivalent to octavalent polyhydric alcohol [D] and a silane-based compound [A] represented by the following general formula (1), wherein it does not contain a water soluble organic solvent [E] except the polyhydric alcohol or contains it under 30 wt.%, and the upper limit of content of the [B] component is 10 wt.%. [(X2N-(CH2)1-)mNH2-m-(CH2)k-]nSi(OR)4-n (1), wherein 1 is an integer of l-4, m is an integer of 0-2, and n is an integer of 1-3. R is hydrogen or 1-4C alkyl group, and X is hydrogen or 1-4C alkyl group.
| WO/1997/017167 | LASER PROCESSING CHAMBER WITH CASSETTE CELL |
| WO/2006/034030 | USING OZONE TO PROCESS WAFER LIKE OBJECTS |
| JPH03204921 | EXFOLIATION DEVICE |
SAKATE KOJI
ISHIKAWA TAKATOSHI
YUSHIRO CHEM IND