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Patent Searching and Data


Title:
STROBOSCOPE ELECTRON BEAM DEVICE
Document Type and Number:
Japanese Patent JPS62186453
Kind Code:
A
Abstract:

PURPOSE: To make it possible to control easily the radiation timing to a sample in a minute scope, by furnishing a cylindrical electrode of a specific length on the passage of pulsated electron beams, and applying a specific DC voltage through a DA converter.

CONSTITUTION: On the passage of pulsated electron beams 9 of a stroboscope electron beam device, is furnished a timing control device consisting of a cylindrical electrode 1 of a given length l1 and a coil 3 to correct the form of the pulsated electron beams 9 installed in the cylinder 1. Then, a specific DC voltage Vd is applied to the cylindrical electrode 1 through a DA converter 2, and converts the speed of the electron beams 9 only when they pass through the cylinder 1. Furthermore, by applying a driving voltage responding to the DC voltage Vd to the coil 3, the variation of the form of the beams 9 is converted. Therefore, by using a simple mechanism, the timing of the beams 9 to reach to the sample 10 is corrected minutely, and the radiation timing can be controlled.


Inventors:
ITO AKIO
OKUBO KAZUO
GOTO YOSHIAKI
OZAKI KAZUYUKI
ISHIZUKA TOSHIHIRO
Application Number:
JP2725686A
Publication Date:
August 14, 1987
Filing Date:
February 10, 1986
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01J37/04; H01J37/28; (IPC1-7): H01J37/04; H01J37/28
Attorney, Agent or Firm:
Motoaki Hisagi