Title:
SUBSTRATE CARRIER AND FILM DEPOSITION APPARATUS
Document Type and Number:
Japanese Patent JP2021138495
Kind Code:
A
Abstract:
To provide a substrate carrier capable of carrying a flexible substrate without bending by its own weight even under a decompression environment, and a film deposition apparatus.SOLUTION: A substrate carrier is for carrying a flexible substrate by a plurality of carrier roller pairs through clamping at only both ends of the substrate in a width direction orthogonal to a carrying direction of the substrate. The carrier roller pair has: a first guide roller provided closer to a first face of the substrate and at one end of the substrate in the width direction; and a second guide roller provided in a manner opposed to the first guide roller closer to a second face opposite to the first face and at one end of the substrate in the width direction. The plurality of carrier roller pairs are provided at both ends of the substrate in the width direction, so that the plurality of carrier roller pairs are arranged to carry the substrate while bending at least a part of both ends of the substrate in the width direction of the substrate.SELECTED DRAWING: Figure 1
Inventors:
ONCHI TAKUYA
Application Number:
JP2020037713A
Publication Date:
September 16, 2021
Filing Date:
March 05, 2020
Export Citation:
Assignee:
TORAY ENG CO LTD
International Classes:
B65G13/04; B65G49/06; C23C16/44