To provide a substrate carrying device, capable of changing a substrate to an inclined attitude when the substrate is being carried straight on a substrate carrying passage without reducing throughput of a substrate processing.
Each magnet gear 231 of a drive shaft 23 and a magnet gear 215 of each carrying roller 21 are disposed close to each other but not in contact. As the drive shaft 23 rotates by rotation drive force from a drive motor or the like, rotation drive force is transmitted from the magnet gear 231 of the drive shaft 23 toward a magnet gear 215 of the carrying roller 21. The carrying rollers 21 are gradually largely inclined from a horizontal attitude in a perpendicular direction to the carrying direction of the substrate B as they go from the carrying roller 21 upstream of the substrate carrying direction to the carrying roller 21 on the downstream side.
YAMAMOTO SATOSHI
JP2000031238A | 2000-01-28 | |||
JP2002265026A | 2002-09-18 | |||
JPH09278172A | 1997-10-28 |
Takao Ito
Jiro Higuchi