To apply desired processing to a substrate, while further stably carrying the large substrate.
This substrate carrying mechanism carries the substrate W by driving a plurality of carrier rollers 30. The carrier rollers 30 include two unit roller shafts 31a and 31b, a roller body 32 fixed to these unit roller shafts 31a and 31b and supporting the substrate W, and a relay means 38 for relaying the mutual unit roller shafts so that the unit roller shafts 31a and 31b integrally rotate on the same axis. The relay means 38 includes a first magnet part (a magnet of a magnetic coupling plate 38) arranged at one side end among ends of the unit roller shafts 31a and 31b, a second magnet part (the magnet of the magnetic coupling plate 38) arranged at the other side end, and a central support plate 44 for rotatably supporting the ends of the respective unit roller shafts 31a and 31b so that these magnet parts interlock the mutual unit roller shafts by mutually opposing with a predetermined clearance.
COPYRIGHT: (C)2010,JPO&INPIT
Masataka Otani
Muramatsu Toshiro