To provide a substrate carrying robot having a linear motion type arm and a direct drive type motor as a rotational driving part and using a motor rotating position detector detecting a position within one rotation.

A large pulley 16 putting a multistage linear motion type arm in extending/contracting operation is constituted to have such a diameter that the rotating amount by a first belt is less than one rotation even if a connection plate for linearly driving a second arm moves a stroke amount in a linear portion of the first belt.