Title:
基板洗浄方法及び基板洗浄装置
Document Type and Number:
Japanese Patent JP4419315
Kind Code:
B2
Inventors:
Yasushi Inagaki
Application Number:
JP2000341094A
Publication Date:
February 24, 2010
Filing Date:
November 08, 2000
Export Citation:
Assignee:
ソニー株式会社
International Classes:
G02F1/13; H01L21/304; B08B3/08; G02F1/1333; H01L21/308
Domestic Patent References:
| JP6163509A | ||||
| JP2000150447A | ||||
| JP2000057953A |
Attorney, Agent or Firm:
Akira Koike
Eiichi Tamura
Seiji Iga
Eiichi Tamura
Seiji Iga